Cabinet heater
Cabinet heater
Designed for wafer fabs and OEMs, the esPRO® Cabinet Heater delivers ultra-clean, high-performance heating for deionized water (DI-Water). Featuring a fully PFA flow path, this heater minimizes particle entrapment, ensuring contamination-free operation. Our turnkey system integrates multiple heating modules with advanced temperature control, maintaining process integrity while optimizing efficiency. Whether for facility-wide fluid heating or precise Point-of-Use applications, esPRO® Cabinet Heaters provide the reliability and performance your critical processes demand.
Benefits
- Ultra-pure PVDF/PFA wetted surfaces
- Wall mounted, with a small footprint
- Plug-and-play system with complete integration of controls
- No N2 purge required
- Flexible design offering a variety of power requirements and options
- Excellent temperature stability
Key features
- Up to 200 kW power
- Max. 95ºC heating capability
- Ultrapure PVDF/PFA wetted surfaces
- Smallest footprint for high power applications
- Easy maintenance with low weight heating elements
- High flow ready (100+ lpm) with 1” connections
- < 5 psi pressure loss at any flow rate
- Temperature control according to flow
- Direct heating for highest efficiency
- Heater activation triggered by flow
- Platinum tipped safety ground wire
- Liquid overtemp and heat wire overtemp detection
- CE, Semi S2 & S3 compliant
- Engineered and made in Germany
Flexible and custom configurations
In addition to our standard configurations, the esPRO® Stand-Alone heaters are also available in custom builds. Just contact us at sales@esproflow.com and we will happily work together with you to create the perfect heater to meet your requirements.
